基板搬送設備

Substrate conveyance facility

Abstract

【課題】収納対象の基板を収納容器に迅速に収納することができる基板搬送設備を提供する。 【解決手段】矩形状の基板を載置支持する複数の支持板45が上下方向に間隔を隔てた状態で並設された収納容器と、収納容器2に収納する収納対象の基板の下面とこの基板を載置支持する支持板45の上面との間に空気を噴出し且つ空気を噴出する噴出状態及び空気の噴出を停止させた噴出停止状態とに切り換え可能な浮上用空気噴出体と、浮上用空気噴出体による空気の噴出により浮上した収納対象の基板をその基板を載置支持する支持板45上に位置するように収納容器に収納する収納手段とが設けられ、支持板45が、基板を載置支持する載置面48aより下方に凹入し且つ基板を載置支持する支持予定領域Eの内外に伸びる凹入部50を備えている。 【選択図】図7
PROBLEM TO BE SOLVED: To provide a substrate conveyance facility, capable of rapidly storing a substrate of a storage object in a storage container. SOLUTION: The substrate conveyance facility includes: a storage container in which a plurality of support plates 45 which supports a rectangular substrate thereon is juxtaposed at vertical intervals; a floating air ejection body which ejects air to between the lower surface of the substrate of the storage object to be housed in the storage container 2 and the upper surface of the support plate 45 which supports this substrate thereon, the ejection body being switchable between an ejection state in which the air is ejected and an ejection stop state in which the ejection of air is stopped; and a storage means which stores the substrate of the storage object, which is floated by ejection of air by the floating air ejection body, in the storage container so as to be situated on the support plate 45 which supports the substrate thereon. The support plate 45 includes a recessed part 50 recessed down over a mount surface 48a on which the substrate is mounted and supported, the recessed part extending to the inside and outside of a support scheduled area E in which the substrate is to be mounted and supported. COPYRIGHT: (C)2010,JPO&INPIT

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Patent Citations (2)

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    JP-2005154060-AJune 16, 2005Watanabe Shoko:Kk, 株式会社渡辺商行被搬送体供給用カセット
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